The 74th JSAP Autumn Meeting,2013

Session information

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Poster presentation

13. Semiconductors A (Silicon) » 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[18p-P11-1~5] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Wed. Sep 18, 2013 1:30 PM - 3:30 PM P11 (Davis Memorial Auditorium)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

1:30 PM - 3:30 PM

△ [18p-P11-4] Evaluation of an Arrayed MEMS Accelerometer

○Daisuke Yamane1, Toshifumi Konishi2, Takaaki Matsushima2, Ken Kagaya1, Masafumi Tsukuda1, Hiroyuki Ito1, Noboru Ishihara1, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Inst. of Tech.1, NTT Advanced Tech. Corp.2, The Univ. of Tokyo3)

1:30 PM - 3:30 PM

△ [18p-P11-5] A Study on Energy Harvesting Devices(1)

○Ken Kagaya1, Toshifumi Konishi2, Daisuke Yamane1, Takaaki Matsushima2, Masafumi Tsukuda1, Hiroyuki Ito1, Noboru Ishihara1, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Institute of Technology1, NTT Advanced Technology Corp.2, The University of Tokyo3)