Oral presentation

[17p-C11-5~6] Plasma Electronics Award Speech

Tue. Sep 17, 2013 4:00 PM - 5:00 PM C11 (TC3 2F-210)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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4:00 PM - 4:30 PM

[17p-C11-5] [Plasma Electronics Award Speech](30 min.) Surface Oxidation of Si Enhanced by Energetic Hydrogen Ion Incidence

tomoko ito¹, kohei mizotani¹, michiro isobe¹, kazuhiro karahashi¹, masanaga fukasawa², kazunori nagahata², tatsuya tatsumi², ^○satoshi hamaguchi¹ (Osaka University¹, SONY Corporation²)

4:30 PM - 5:00 PM

[17p-C11-6] [Plasma Electronics Award Speech](30 min.) Real-time in-situ electron-spin-resonance analysis of plasma-surface interactions

^○Kenji Ishikawa¹, Naoya Sumi¹, Akihiko Kono², Hideo Horibe², Keigo Takeda¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹, Kanazawa Inst.²)

Sessions

08. Plasma Electronics » Plasma Electronics Award Speech

[17p-C11-5~6] Plasma Electronics Award Speech

[17p-C11-5] [Plasma Electronics Award Speech](30 min.) Surface Oxidation of Si Enhanced by Energetic Hydrogen Ion Incidence

[17p-C11-6] [Plasma Electronics Award Speech](30 min.) Real-time in-situ electron-spin-resonance analysis of plasma-surface interactions