Analysis of a magnetic-field-superposed-objective cathode lens using boundary charge method and boundary magnetic charge method

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

Mon. Sep 16, 2013 9:15 AM - 12:00 PM A13 (TC1 3F-323)

10:00 AM - 10:15 AM

Kouhei Ichiki¹, Michinori Ishigami¹, Ryousuke Inagaki¹, ^○Hidekazu Murata¹, Hiroshi Shimoyama¹ (Meijo Univ.)

Keywords:対物レンズ,LEEM,PEEM