The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[16a-A13-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

Mon. Sep 16, 2013 9:15 AM - 12:00 PM A13 (TC1 3F-323)

10:15 AM - 10:30 AM

[16a-A13-5] X-ray spectrum measured by using TES type microcalorimeter

○Kenichi Shiiyama1, Yuji Masaki2, Shoichi Toh3, Keisuke Maehata2, Keiichi Tanaka4, Kazuhiro Yasuda2, Syo Matsumura2 (Junshin Gakuen Univ.1, Kyushu Univ.2, HVEM Lab. Kyushu Univ.3, Hitachi High-Technologies Co.4)

Keywords:Ｘ線スペクトル,元素分析,エネルギー分散型