Prediction of Argon Flow and Impurity Transport <br>in a CZ-Si Crystal Growth with Different Gas Flow Solvers

Presentation information

Oral presentation

15. Crystal Engineering » 15.1 Bulk crystal growth

Mon. Sep 16, 2013 9:15 AM - 12:00 PM B3 (TC2 1F-105)

9:15 AM - 9:30 AM

^○Xin Liu¹, Bing Gao¹, Satoshi Nakano¹, Koichi Kakimoto¹ (RIAM, Kyushu Univ.¹)

Keywords:cz