The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[16p-A13-1~14] 7.3 Lithography

Mon. Sep 16, 2013 1:30 PM - 5:30 PM A13 (TC1 3F-323)

3:00 PM - 3:15 PM

[16p-A13-6] Design and Creation of Three-Dimensional Nanomechancal Resonator for Improving Q Factor

○Kenji Yamazaki1, Hiroshi Yamaguchi1 (NTT Basic Research Labs.1)

Keywords:3Dナノ加工,ナノメカニカル共振器