[16p-A2-1~8] 1.3 Novel technologies

[16p-A2-5] Fabrication of the VO_x thin films for the bolometer on Si₃N₄/SiO₂ membrane

^○Akihito Matsushita¹, Takashi Tachiki¹, Takashi Uchida¹ (NDA¹)

Keywords:テラヘルツ