[16p-B1-1~11] 17.4 Device application

[16p-B1-11] Intercalation for interconnects of multi–layer graphene grown by CVD

^○Haruhisa Nakano¹, Ichiro Kubota¹, Boo Zhou¹, Daiyu Kondo¹, Kenjiro Hayashi¹, Makoto Takahashi¹, Motonobu Sato¹, Katsunori Yagi¹, Shu Nakaharai¹, Shintaro Sato¹, Naoki Yokoyama¹ (GNC,AIST¹)

Keywords:グラフェン,インターカレーション,配線