[16p-B2-1~14] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[16p-B2-11] Studies of stepped reverse current-voltage characteristics of pn junction diodes (2)

^○Susumu Murakami¹, Shigeru Kokunai², Satsuki Kobayashi², Satoshi Matsuyoshi³, Takeshi Terakawa³, Shin-ichi Kurita³, Minoru Nakamura⁴ (Hitachi,Ltd., HItachi Res. Lab.¹, Hitachi Haramachi Electronics Co. Ltd.², Hitachi, Ltd., Power & Indust. Sys. Div.³, Ibaraki Univ.⁴)

Keywords:リーク電流,結晶欠陥,シリコン