The 74th JSAP Autumn Meeting,2013

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15. Crystal Engineering » 15.8 Crystal evaluation, nanoimpurities and crystal defects

[16p-B2-1~14] 15.8 Crystal evaluation, nanoimpurities and crystal defects

Mon. Sep 16, 2013 1:30 PM - 5:15 PM B2 (TC2 1F-102)

2:00 PM - 2:15 PM

[16p-B2-3] Effect of interstitial impurities on point defect concentration in growing single crystal Si

○Koji Sueoka1, Eiji Kamiyama1 (Okayama Pref. Univ.1)

Keywords:点欠陥,不純物効果,Si結晶成長