[16p-B2-1~14] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[16p-B2-5] Vacancies Evaluation of CZ silicon crystal by low temperature ultrasonic measurement and secondary defect measurement (2): Correlation of vacancy and BMD density.

^○kazuki Okabe^1,2, Hiroyuki Saito², Kazuhiko Kashima², Hiroshi Kaneta^1,3, Yoshihiko Saito⁴, Yuichi Nemoto¹, Terutaka Goto¹ (Niigata Univ.¹, GWJ², Kyushu Inst. of Tech.³, Toshiba⁴)

Keywords:CZシリコン,原子空孔,BMD