[16p-B2-1~14] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[16p-B2-8] Photoluminescence Analysis of Carbon Impurity in Si Epitaxial Wafers for Power Device

^○Satoko Nakagawa¹, Kazuhiko Kashima¹ (GWJ¹)

Keywords:シリコン,フォトルミネッセンス,カーボン