[16p-B3-1~10] 17.1 Growth technology

△ [16p-B3-5] Carbon Nanotubes and Vertical, Longitudinal, and Lateral Multilayer Graphene Growth by a Novel Heat-Beam assisted Thermal CVD

^○(D)Kazuyuki Ito¹, Ryosuke Sawabe¹, Yuji Awano¹ (Keio Univ.¹)

Keywords:グラフェン,カーボンナノチューブ,CVD