[16p-B3-1~10] 17.1 Growth technology

[16p-B3-9] The development of CNT growth using liquid source as new catalyst precursor

^○Yuki Usuda¹, Takahiro Kikuchi¹, Hitoshi Sato³, Tauto Nakanishi³, Takashi Kato³, Kyoichi Tomita³, Hidenori Mimura², Takayuki Nakano¹, Yoku Inoue¹ (Shizuoka Univ. Eng.¹, Shizuoka Univ. RIE², JNC³)

Keywords:CNT,CVD,CNTアレイ