[16p-B4-1~8] Joint session K

[16p-B4-8] Epitaxial growth of ZnGa₂O₄ films by mist chemical vapor deposition

^○Mifuyu Niwa¹, Akira Mukai¹, Takayoshi Oshima¹, Tomohumi Nagami², Toshihisa Suyama², Akira Ohtomo^1,3,4 (Tokyo Tech¹, Tokuyama Corp², MCES³, JST-ALCA⁴)

Keywords:ミストCVD,ZnGa2O4