[16p-C7-1~12] Organic nano-interfacial controlled electronics　(NICE)

[16p-C7-11] Analysis of the interfacial damage between organic/metal interfaces caused by face target spattering process

^○Kouji Suemori¹, Satoshi Hoshino¹, Nobuki Ibaraki¹, Toshihide Kamata¹ (AIST¹)

Keywords:対向ターゲットスパッタリング,界面損傷,有機デバイス