The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

01. Applied Physics in General » 1.7 Instrumentation and measurement

[16p-C8-1~12] 1.7 Instrumentation and measurement

Mon. Sep 16, 2013 1:30 PM - 5:00 PM C8 (TC3 2F-201)

3:00 PM - 3:15 PM

[16p-C8-6] Quantitative Estimation of Background Radiance for Radiation Thermometry

Tomoyuki Iwasaki1, Tohru Iuchi2 (Chino Corp.1, Toyo Univ.2)

Keywords:放射測温,背光,シリコンウエハ