The 74th JSAP Autumn Meeting,2013

Presentation information

Symposium

Symposium planned by Program Committee » Control of nanostructure by self assemble technology and thier device application

[16p-D1-1~6] Control of nanostructure by self assemble technology and thier device application

Mon. Sep 16, 2013 1:30 PM - 4:30 PM D1 (MK 1F-101)

4:00 PM - 4:30 PM

[16p-D1-6] Nanomorphologies Tailored by Oblique Angle Deposition and Their Applications

Motofumi Suzuki1 (Kyoto Univ.1)

Keywords:斜め蒸着法,物理的自己組織化,形態制御