4:00 PM - 4:30 PM
[16p-D1-6] Nanomorphologies Tailored by Oblique Angle Deposition and Their Applications
Keywords:斜め蒸着法,物理的自己組織化,形態制御
Symposium
Symposium planned by Program Committee » Control of nanostructure by self assemble technology and thier device application
Mon. Sep 16, 2013 1:30 PM - 4:30 PM D1 (MK 1F-101)
4:00 PM - 4:30 PM
Keywords:斜め蒸着法,物理的自己組織化,形態制御