[16p-D3-1~13] 6.3 Oxide-based electronics

[16p-D3-2] Fabrication of 100 nm Width VO₂ Nanowires by Phase-Selective Etching

^○Takeaki Yajima¹, Yuma Ninomiya¹, Tomonori Nishimura¹, Kosuke Nagashio¹, Akira Toriumi¹ (Univ. of Tokyo¹)

Keywords:相転移,ナノワイヤ,モットトランジスタ