The 74th JSAP Autumn Meeting,2013

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14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.4 Optical properties and light-emitting devices

[16p-D6-1~16] 14.4 Optical properties and light-emitting devices

Mon. Sep 16, 2013 1:00 PM - 5:15 PM D6 (MK 3F-301)

1:30 PM - 1:45 PM

[16p-D6-3] Fabrication of nitrogen terminated silicon nanoparticles by reactive RF sputtering

○Shun Ito1, Keisuke Sato1, Kenji Hirakuri1 (Tokyo Denki Univ.1)

Keywords:シリコンナノ粒子