[16p-P7-1~52] 17 Nanocarbon Technology(poster)

[16p-P7-42] In-situ Raman Observation of Graphene during Formation of Al₂O₃ Gate Dielectrics

^○Ryota Suto¹, Ryo Sato¹, Hirokazu Fukidome¹, Maki Suemitsu¹ (Tohoku University Research Institute of Electrical Communication¹)

Keywords:グラフェン,FET,ラマン