Characterization of low resistivity AZO thin films grown by RF sputtering under H<sub>2</sub> atmosphere

Presentation information

Poster presentation

Joint session K » Joint session K

Mon. Sep 16, 2013 1:30 PM - 3:30 PM P8 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

^○Masaki Tanaka^1,2, Kenji Yoshino² (Ube Material Industries, Ltd.¹, Miyazaki Univ.²)

Keywords:酸化亜鉛,透明導電膜