[16p-P8-1~21] Joint session K

[16p-P8-17] Evaluation of Defects in Crystalline IGZO Powder

^○Tokiyoshi Matsuda^1,2, Daiki Nishimoto¹, Kota Takahashi¹, Taiki Ueno¹, Mutsumi Kimura^1,2 (Ryukoku Univ.¹, Ryukoku Univ. JRCST²)

Keywords:格子欠陥,電子スピン共鳴,酸化物半導体