[16p-P8-1~21] Joint session K

[16p-P8-21] Growh of Ga-doped ZnO Films by Atomospheric-pressure CVD under Alternate-source-supply and their Temperature Dependence of Carrier Tranport Properties

^○Shohei Fujimoto¹, Takashi Fujita², Tomoaki Terasako¹, Akira Miyata², Sho Shirakata¹ (Sci.&Eng.,Ehime Univ¹, Fac.Eng.,Ehime Univ²)

Keywords:ZnO,Carrier Transport Properties,大気圧CVD法