[16p-P8-1~21] Joint session K

[16p-P8-7] New formation techniques of texture-etched surface in transparent conducting AZO films prepared by magnetron sputtering

^○Toshinori Yamanaka¹, Jun-ichi Nomoto¹, Toshihiro Miyata¹, Tadatsugu Minami¹ (KIT¹)

Keywords:AZO,透明導電膜