9:00 AM - 9:45 AM
[17a-A13-1] [INVITED]Application of an aligned O2 beam to surface reaction analysis
Keywords:酸素分子,表面反応,シリコン
Presentation information
Oral presentation
07. Beam Technology and Nanofabrication » 7.5 Particle/photon-beam-induced surface reactions
[17a-A13-1~10] 7.5 Particle/photon-beam-induced surface reactions
Tue. Sep 17, 2013 9:00 AM - 12:15 PM A13 (TC1 3F-323)