[17a-B1-1~11] 17.1 Growth technology

[17a-B1-3] High-quality graphene synthesis of plasma CVD using extremely low concentration of carbon source

^○Ryuichi Kato¹, Kazuo Tsugawa¹, Masatou Isihara^1,2, Yuki Okigawa^1,2, Takatoshi Yamada^1,2, Masataka Hasegawa^1,2 (TASC¹, AIST NTRC²)

Keywords:グラフェン,プラズマ