The 74th JSAP Autumn Meeting,2013

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Oral presentation

Joint session K » Joint session K

[17a-B4-1~12] Joint session K

Tue. Sep 17, 2013 9:00 AM - 12:15 PM B4 (TC2 1F-106)

9:00 AM - 9:15 AM

[17a-B4-1] Fabrication of crundum-structured In2O3 thin films by mist-CVD method

○Norihiro Suzuki1, Kentaro Kaneko1, Shizuo Fujita1 (Kyoto Univ.1)

Keywords:酸化インジウム,ミストCVD,コランダム