The 74th JSAP Autumn Meeting,2013

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Joint session K » Joint session K

[17a-B4-1~12] Joint session K

Tue. Sep 17, 2013 9:00 AM - 12:15 PM B4 (TC2 1F-106)

10:15 AM - 10:30 AM

[17a-B4-6] Study of oxygen source of ZnO thin film grown by halide vapor phase epitaxy

○Naoto Kanzaki1, Yuta Isa1, Song-Yun Kang2, Rie Togashi1, Hisashi Murakami1, Yoshinao Kumagai1, Yusaku Kashiwagi2, Akinori Koukitu1 (Dept. of Appl. Chemistry, Tokyo Univ. of Agri. and Tech.1, Tokyo Electron Ltd.2)

Keywords:HVPE,酸化亜鉛