The 74th JSAP Autumn Meeting,2013

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Oral presentation

Joint session K » Joint session K

[17a-B4-1~12] Joint session K

Tue. Sep 17, 2013 9:00 AM - 12:15 PM B4 (TC2 1F-106)

10:45 AM - 11:00 AM

[17a-B4-7] Growth mechanism of ZnO films fabricated by atmospheric pressure plasma enhanced CVD

○(D)Yukinori Nose1, Tatsuru Nakamura1, Takeshi Yoshimura1, Atsushi Ashida1, Tsuyoshi Uehara2, Norifumi Fujimura1 (Osaka Prefecture Univ.1, SEKISUI CHEMICAL CO., LTD.2)

Keywords:ZnO,大気圧プラズマ,CVD