The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Insulator technology

[17a-B5-1~10] 13.3 Insulator technology

Tue. Sep 17, 2013 9:15 AM - 12:00 PM B5 (TC2 2F-201)

9:30 AM - 9:45 AM

[17a-B5-2] Low-Temperature Fabrication of gate oxide using a SOG solution

○Ryo Usuda1, Shinji Nozaki1, Kazuo Uchida1 (UEC Tokyo1)

Keywords:シリコン酸化膜,spin on glass,UV光酸化