The 74th JSAP Autumn Meeting,2013

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08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[17a-C1-1~8] 8.3 Plasma deposition of thin film and surface treatment

Tue. Sep 17, 2013 9:45 AM - 11:45 AM C1 (TC3 1F-101)

9:45 AM - 10:00 AM

[17a-C1-1] Production of VHF-DC Superimposed Magnetron Plasma and Plasma Diagnostics

○Hayato Ogawa1, Yushi Fukuoka1, Hirotaka Toyoda1,2 (Nagoya Univ1, PLANT, Nagoya Univ2)

Keywords:スパッタリング　,VHF,DC