[17a-C1-1~8] 8.3 Plasma deposition of thin film and surface treatment

△ [17a-C1-6] Investigation of Resist Removal Characteristics using Microwave Excited Bubble Plasma under Water

^○(M2)Kouhei Nosaka¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Hideo Horibe², Yosuke Goto² (Kanazawa University¹, Kanazawa Institute of technology²)

Keywords:液中プラズマ,レジスト膜