The 74th JSAP Autumn Meeting,2013

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Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[17a-C1-1~8] 8.3 Plasma deposition of thin film and surface treatment

Tue. Sep 17, 2013 9:45 AM - 11:45 AM C1 (TC3 1F-101)

11:30 AM - 11:45 AM

△ [17a-C1-8] Synthesis of Nitride Thin Film on Titanium with Atmospheric-Pressure Plasma Jet

○Yuki Yoshimitsu1, Ryuta Ichiki1, Shogo Kannda1, Masashi Yoshida2, Shuichi Akamine1 (Oita Univ.1, Shizuoka Inst. Sci. Technol2)

Keywords:窒化チタン,大気圧プラズマジェット