[17a-C2-1~10] 8.4 Plasma etching

△ [17a-C2-8] Mechanism of Generating Active Species and Etch Reaction in CHxFy Plasma (III)

^○(D)Yusuke Kondo¹, Yudai Miyawaki¹, Keigo Takeda¹, Hiroki Kondo¹, Kenji Ishikawa¹, Toshio Hayashi¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹)

Keywords:エッチング,フルオロカーボン,プラズマ診断