The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[17a-D3-1~13] 6.3 Oxide-based electronics

Tue. Sep 17, 2013 9:30 AM - 1:00 PM D3 (MK 2F-201)

9:30 AM - 9:45 AM

[17a-D3-1] Epitaxial growth of anatase TixTa1-xO1+yN1-z thin film

Atsushi Suzuki1,2,3, Yasushi Hirose1,2,3, Daichi Oka1,2,3, Syoichiro Nakao2,3, Hiroyuki Matsuzaki4, Katsuyuki Fukutani5, Satoshi Ishii6, Kimikazu Sasa6, Daiichiro Sekiba6, Tomoteru Fukumura1,2,3, Tetsuya Hasegawa1,2,3 (Univ. of Tokyo1, KAST2, JST-CREST3, Univ. of Tokyo4, Univ. of Tokyo5, Tsukuba Univ.6)

Keywords:酸窒化物,エピタキシャル成長