[17a-D3-1~13] 6.3 Oxide-based electronics

△ [17a-D3-1] Epitaxial growth of anatase Ti_xTa_1-xO_1+yN_1-z thin film

^○Atsushi Suzuki^1,2,3, Yasushi Hirose^1,2,3, Daichi Oka^1,2,3, Syoichiro Nakao^2,3, Hiroyuki Matsuzaki⁴, Katsuyuki Fukutani⁵, Satoshi Ishii⁶, Kimikazu Sasa⁶, Daiichiro Sekiba⁶, Tomoteru Fukumura^1,2,3, Tetsuya Hasegawa^1,2,3 (Univ. of Tokyo¹, KAST², JST-CREST³, Univ. of Tokyo⁴, Univ. of Tokyo⁵, Tsukuba Univ.⁶)

Keywords:酸窒化物,エピタキシャル成長