The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[17a-D3-1~13] 6.3 Oxide-based electronics

Tue. Sep 17, 2013 9:30 AM - 1:00 PM D3 (MK 2F-201)

12:00 PM - 12:15 PM

[17a-D3-10] Improvement of electronic property in Nb-F doped CVD-TiO2 layer by wet-process

○Satoshi Yamauchi1, Kazuhiro Ishibashi1 (Ibaraki Univ.1)

Keywords:酸化チタン,透明導電膜,化学気相堆積法