ITO thin films fabricated by hybrid facing-target sputtering on the film

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

Tue. Sep 17, 2013 9:30 AM - 1:00 PM D3 (MK 2F-201)

12:30 PM - 12:45 PM

^○Shinichi Morohashi¹, Keita Usui¹, Fumihiro Takaki¹, Naoyuki Harada¹, Takuya Murata¹ (Yamaguchi Univ.¹)

Keywords:ハイブリッド対向スパッタ,Hybrid facing-target sputtering