Evaluation of Etching Damage Recovery in XAS spectra of TiO<sub>2</sub> Thin Films

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

Tue. Sep 17, 2013 9:30 AM - 1:00 PM D3 (MK 2F-201)

10:30 AM - 10:45 AM

^○Keiji Sano¹, Masahito Niibe¹, Retsuo Kawakami², Kikuo Tominaga², Yoshitaka Nakano³ (Univ. Hyogo¹, Univ. Tokushima², Chubu Univ.³)

Keywords:酸化チタン,XAS,エッチング