[17a-D7-1~11] 14.4 Optical properties and light-emitting devices

△ [17a-D7-10] Fabrication of ZnO fluorescent thin films by RF magnetron sputtering and observation of samples by electron beam excitation assisted optical microscope

^○Satoshi Kanamori¹, Aki Miyake^1,2,3, Wataru Inami^1,2,3, Hiroko Kominami^1,3, Yoshimasa Kawata^1,2,3, Yoichiro Nakanishi³ (Graduate school of Engineering, Shizuoka Univ.¹, JST-CREST², Research Institute of Electronics, Shizuoka Univ.³)

Keywords:酸化亜鉛