[17a-P14-1~16] 4.2 Photonic nonostructures and phenomena

△ [17a-P14-8] Influence of Etching Profile on Optical Properties of 3D Photonic crystals Fabricated by Simultaneous, Three-directional Etching

^○Keisuke Kitano¹, Kenji Ishizaki¹, Kou Gondaira¹, Katsuyoshi Suzuki¹, Susumu Noda¹ (Kyoto Univ.¹)

Keywords:3次元フォトニック結晶,プラズマエッチング