The 74th JSAP Autumn Meeting,2013

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Poster presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17a-P15-1~9] 6.2 Carbon-based thin films

Tue. Sep 17, 2013 9:30 AM - 11:30 AM P15 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[17a-P15-3] Synthesis of DLC-Si Films using Plasma Generated by Pulse-Bias Voltage

○Yuya Tachibana1, Noriaki Ikenaga1, Ryouichi Hanaoka1, Noriyuki Sakudo1 (Kanazawa Inst.1)

Keywords:Diamond-Like-Carbon,パルスバイアスプラズマ