The 74th JSAP Autumn Meeting,2013

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Poster presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17a-P15-1~9] 6.2 Carbon-based thin films

Tue. Sep 17, 2013 9:30 AM - 11:30 AM P15 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[17a-P15-8] Fabrication process suitable for δ P-doped diamond multi-layered film on vicinal (001) substrate using high-power-density microwave plasma CVD method

○Norimasa Ohashi1, Osamu Maida1, Toshimichi Ito1 (Osaka Univ.1)

Keywords:ダイヤモンド,リン