[17a-P16-1~7] 6.4 New thin-film materials

[17a-P16-4] A study on the preparation of tantalum- and tungsten-doped vanadium oxide films as a detector material for infrared sensors

Kazuhiro Saito¹, Hiroshi Nisase¹, Ryosuke Watanabe¹, ^○Yoji Saito¹ (Seikei Univ.¹)

Keywords:ボロメータ,赤外線センサ,酸化バナジウム