Fabrication and characterization of Cu3N thin films

Presentation information

Poster presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

Tue. Sep 17, 2013 9:30 AM - 11:30 AM P16 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

^○Koh Shimizu¹, Kohei Maruya¹, Yoshihiko Ninomiya¹, Atsushi Sato¹, Naoomi Yamada¹ (Chubu Univ.¹)

Keywords:Cu3N,スパッタ,低温成長