Evaluation of piezoelectric Ta<sub>2</sub>O<sub>5</sub> thin film deposited on Ta oxide film

Presentation information

Oral presentation

01. Applied Physics in General » 1.9 Ultrasonic

Tue. Sep 17, 2013 1:00 PM - 3:15 PM A2 (TC1 1F-116)

1:15 PM - 1:30 PM

^○Shunsuke Iwamoto¹, Ryosuke Saigusa¹, Shoji Kakio¹ (Univ. of Yamanashi¹)

Keywords:圧電薄膜