A method for predicting thickness of unoriented layer in initial growth of piezoelectric film using thickness resonance mode

Presentation information

Oral presentation

01. Applied Physics in General » 1.9 Ultrasonic

Tue. Sep 17, 2013 1:00 PM - 3:15 PM A2 (TC1 1F-116)

1:30 PM - 1:45 PM

^○Shinji Takayanagi¹, Takahiko Yanagitani², Mami Matsukawa¹ (Doshisha Univ.¹, Nagoya Inst. Tech.²)

Keywords:圧電薄膜,無配向層,厚み共振