[17p-A3-1~18] 4.7 Laser processing

[17p-A3-13] Reduction of debris by the plume collision by the pulse laser ablation method.

^○Masaki Kashita¹, Yasuhiro Yokoyama¹, Hiroshi Fukuoka², Akira Sugimura¹, Ikurou Umezu¹ (Dept.of Phys.Konan Univ¹, Nara National College of Technology²)

Keywords:レーザーアブレーション,デブリ,エクリプス法